Oxide	Thermal SiO2 PE-SiO2 PE-TEOS LPCVD-TEOS HDP USD, PSG, BPSG
Polysilicon	Doped and Undoped Amorphous
Low-k	Black Diamond BLOk CORAL SiON
金屬	Refractory – Ta, TaN, Ti TiN, TiW, W, WSi, WN and Cr Conductive – Cu, Al, AlCu, AlSi, AlSiCu Ferromagnetic – Co, Ni
Nitride	LP-CVD SiN PE-CVD SiN
Photoresists	i-Line KrF ArF e-beam