| Oxide |
Thermal SiO2
PE-SiO2 PE-TEOS LPCVD-TEOS HDP USD, PSG, BPSG |
| Polysilicon |
Doped and Undoped
Amorphous |
| Low-k |
Black Diamond
CORAL SiON |
| Metal |
Refractory – Ta, TaN, Ti TiN, TiW, W, WSi, WN , Cr
Conductive – Cu, Al, AlCu, AlSi, AlSiCu Ferromagnetic – Co, Ni |
| Nitride |
LP-CVD SiN
PE-CVD SiN |
| Photoresists |
i-Line
KrF ArF |